With the rapid development of mico-nano propulsion systems in micro-spacecrafts and micro-sattelites, precise investigation of flow field in these devices has become necessary. Micro propulsion systems usually have a thrust in order of mili Newton, and they can be used for maneuvers of spacecrafts with mass of less than 10 kg. Micro propulsion systems are usually classified according to their thrust generation mechanism to different classes like cold gas, and chemical propulsion systems. Cold gas micro propulsion systems obtain their energy from thermodynamic expansion of gas and not by combustion. If the flow fiel dimensionare comparable to mean free path, rarefaction effects are observed...