Loading...

Design and Fabrication of a Flexure-Based Nano-Precision XY Positioning Stage

Darki, Ali Akbar | 2010

612 Viewed
  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 40334 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Zohoor, Hassan
  7. Abstract:
  8. Nanopositioning is a technology for moving a target object within nanometer (10-9 meter) resolution. Nowadays nanopositioning stages have emerged as an important technological advancement in hi-tech applications, including scanning probe microscopy, lithography, nanometrology, fabrication and assembly of nanostructures and beam steering for optical communication systems. To achieve nanometer resolution the stage must focus on a few tens of micrometers travel range. The combination of piezoelectric actuators and monolithic compliant mechanisms can provide a smooth motion without friction, wear, and backlash. So, piezo-driven compliant mechanisms are used widely in nanopositioning systems. The main goal of present work is to design and fabricate a positioning stage that can move in XY plane with nanoscale resolution. The geometry of mechanism and values of design parameters are optimized in order to achieve improved characteristics. Optimization follows several objectives such as maximizing travel range and working frequency and minimizing cross coupling of axes and parasitic rotational motion. In present work, at first, a matrix model is developed to describe static behavior of the stage. This model is verified in comparison to a finite element model. Then the matrix model is optimized through genetic algorithm process. Finally, the optimized stage is fabricated and its performance is estimated using a laser interferometer motion sensor. Results show that the stage has a travel range of 34 micrometers on every axis and it can rapidly follow nanoscale steps. Results also show less than 4% crosstalk between axes. Less than 10 milliseconds response time to a full range step makes the stage capable of scanning patterns up to 5 Hz dynamic motion.

  9. Keywords:
  10. Piezoelectric Actuator ; Flexure Mechanism ; Precise Positioning ; Mechanism Optimization ; Nanometer Resolution

 Digital Object List

  • محتواي پايان نامه
  •   view

 Bookmark

No TOC