![]() |
Design and Implement of the Ion Implanter’s Ion Gun Power Supplies by Using the Resonant Converters, Ph.D. Dissertation Sharif University of Technology ; Rashidian, Bizhan (Supervisor) ; Zolghadri, Mohammad Reza (Supervisor) ; Alavi, Mohammad Hossein (Co-Advisor)
Abstract
In the Ion Implanter system a controled current through a tungesten filament, supplies the heat which causes the thermoionic emmition to ionize the gas molecules. Then the negativly charged electrones that are boiled off the filament, and also the ones that are removed from the outer ring of the gas molecules during the ionization process, are attracted by an adjustable voltage source. In this thesis, two resonant converter topologies are proposed to designe and to implement the adjustable current and voltage sources for ion implantation system. Unlike the PWM converters soft switching techniques, used auxiliary circuits to reduce the switching losses and EMI noises, in the proposed resonant...
Cataloging briefDesign and Implement of the Ion Implanter’s Ion Gun Power Supplies by Using the Resonant Converters, Ph.D. Dissertation Sharif University of Technology ; Rashidian, Bizhan (Supervisor) ; Zolghadri, Mohammad Reza (Supervisor) ; Alavi, Mohammad Hossein (Co-Advisor)
Abstract
In the Ion Implanter system a controled current through a tungesten filament, supplies the heat which causes the thermoionic emmition to ionize the gas molecules. Then the negativly charged electrones that are boiled off the filament, and also the ones that are removed from the outer ring of the gas molecules during the ionization process, are attracted by an adjustable voltage source. In this thesis, two resonant converter topologies are proposed to designe and to implement the adjustable current and voltage sources for ion implantation system. Unlike the PWM converters soft switching techniques, used auxiliary circuits to reduce the switching losses and EMI noises, in the proposed resonant...
Find in contentBookmark
|
![]() |
|