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Preparation, Characterization and Applications of Niobium Oxide Nanorods by Combined Sputtering-Thermal Oxidation Method

karimi khaneghah, Shamim | 2011

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 41817 (04)
  4. University: Sharif University of Technology
  5. Department: Physics
  6. Advisor(s): Moshfegh, Ali Reza; Akhavan, Omid
  7. Abstract:
  8. Recently, quasi 1D (Q1D) structures of materials such as nanowires, nanorods and nanobelts with high surface to volume ratio (A/V) and small grain size devoted an extensive part of researches. This is due to their unique properties and thus various applications in manufacturing of nanometric devices. Niobium pentoxide (Nb2O5) as semiconductor with wide bandgap has been applied in various fields including: electrochromic devices, gas sensors, anti-reflective coatings, capacitors, photocatalysts , field emission and recently; antibacterial systems. In this project , initially niobium thin films was deposited on Si(100) substrate using RF magnetron sputtering method and then niobium oxide nanorods was grow by thermal oxidation in controlled conditions of temperature , pressure, time , gas environment for heat treatment in quartz tube furnace. The effect of various annealing parameters has been investigated in order to determine optimum growth conditions and compare the results.Optimum conditions for growth of nanorods were specified as T= 650 °C , PAr = 3 Torr , t= 2h. Niobium oxide nanorods have been characterized with various analytical techniques such as: scanning electron microscopy (SEM), Xray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and atomic force microscopy (AFM). According to our data analysis the grown nanorods have monoclinic structure with about ~450 nm in height and ~55 nm in diameter. Finally; gas sensing and antibacterial properties of the nanorods have been investigated and compared
  9. Keywords:
  10. Nanorod ; Gas Sensor ; Niobium Oxide ; Sputtering-Thermal Oxidation Method

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