Design, modeling and optimization of a novel two DOF polymeric electro-thermal micro-actuator

Sheikhbahaie, R ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.4028/www.scientific.net/AMM.307.112
  3. Abstract:
  4. In this paper, design, simulation and optimization of a novel electrothermally-activated polymeric microactuator capable of generating combination of bidirectional lateral and rotational motions are presented. The composite structure of this actuator is consisted of a symmetric meandered shape silicon skeleton, a SU8 thermal expandable polymer and a thin film chrome layer heater. This actuator is controlled by applying appropriate voltages on its four terminals. With the purpose of dimension optimization, a numerical parametric study is executed. The modeled actuator which is 1560 ?m long, 156 ?m wide and 30 ?m thick, demonstrates a remarkable lateral displacement of 23 ?m at power consumption of 38 mW and a considerable rotation of about 7.5 at the same power consumption but with excitation of different terminals
  5. Keywords:
  6. Chrome layer ; Electro-thermal microactuators ; Finite element simulations ; Lateral displacements ; Modeling and optimization ; Numerical parametric studies ; Polymeric ; Polymeric microactuator ; Rotational motion ; Simulation and optimization ; SU8 ; Computational mechanics ; Microactuators
  7. Source: Applied Mechanics and Materials ; Vol. 307 , 2013 , pp. 112-116 ; ISSN: 16609336 ; ISBN: 9783037856598
  8. URL: http://www.scientific.net/AMM.307.112