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Nonlinear Vibration and Pull-in Analysis in Electrostatically Actuated Dual Axis Micromirrors

Chahari, Mahmood | 2016

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 48451 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Ahmadian, Mohammad Taghi; Firoozbakhsh, Keykhosro
  7. Abstract:
  8. In recent decades, the important role of MEMS devices in optical systems has initiated the development of a new class of MEMS called Micro-Opto-Electro-Mechanical Systems (MOEMS), which torsional micromirror is one of these systems. Among variety kinds of micromirrors the dual axis micromirror has hopefully application such as high quality projection display, free-space fiber optical (FSO) communications and endoscopic optical coherence topography. Dual axis micromirror could play a key role in FSO applications such as satellite-to-satellite separated by hundreds of kilometers, as where. In medical applications, micromirror must could be able to rotates θ_x and θ_y.about two axis x and y,respectively Because of the importance of these systems in variety of industries, in this project the static and dynamic behavior of electrostatic dual axis micromirrors under the effect squeezed film damping are studied. The prior papers published in the literature have mainly investigate numerical analysis of two degree of freedom micromirrors. Usually for accomplishing large scanning angles, micromirrors are excited at their natural frequencies. So it is necessary to study the internal and external resonance that happens, as a result. The purpose of this project is analysis of a two DOF dual axis micromirror that be able to rotates around x and y axes considering squeezed film damping. Finally the nonlinear vibrational behavior of the mirror is modeled using the Lagrange equations and after that by using the straight forward perturbation the semi-analytical response of micromirror is developed. Results show that by increasing DC voltage electrostatic spring softening is happed and natural frequencies of system are decreased by increasing bias voltage. The problem of squeeze film damping in micromirrors is also solved using extended Kantorovich method that results show high convergence of this method
  9. Keywords:
  10. Electrostatic Actuation ; Squeeze Film Damping ; Extended Kantorovich Method ; Nonlinear Vibration ; Pull-in Phenomenon ; Dual Axis Micromirror

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