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- Type of Document: M.Sc. Thesis
- Language: Farsi
- Document No: 48540 (08)
- University: Sharif University of Technology
- Department: Mechanical Engineering
- Advisor(s): Nejat Pishkenari, Hossein
- Abstract:
- Nanopositioning is technology of positioning & manipulation of Nano-scale object. This technology can be considered as one of the fundamental necessities in Nano & Micro research and fabrication and made lots of unbelievable advancement in researches and technologies. There are lots of mechanical systems designed for large scale positioning with sub millimeter resolution, but when it’s come to Nano scale, the range of access should be limited to some micrometer. Also in Nano-scale motion some difficulties like backlash, stick-slip and friction is phenomenon. For increasing the workspace using coarse and fine positioning systems may be an appropriate method. In this method a fine positioning system is mounted on top of a coarse one. The coarse positioning has a range of some centimeter and resolution of tens of micrometers. After that the coarse positioner will lock in the position and Nano-scale positioning will happen. To overcome the backlash, stick-slip and friction, the flexure mechanism will be used. The goal of this project is to design and fabricate a novel Nanopositioning system based on combined positioning for covering a centimeter rang of access by coarse positioning and reaching a nanometer resolution in fine positioning. In addition the design is looking for a mechanism with minimum cross coupling of axes and a maximum amplification of the Piezo movement. The positioner will work in a close loop control system which will result in more precise positioning and robustness
- Keywords:
- Nanopositioning ; Piezoelectric Actuator ; Nanometer Resolution ; XY Precise Positioning Stage
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