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Fabrication of gas ionization sensor using carbon nanotube arrays grown on porous silicon substrate
989 viewed

Fabrication of gas ionization sensor using carbon nanotube arrays grown on porous silicon substrate

Nikfarjam, A

Fabrication of gas ionization sensor using carbon nanotube arrays grown on porous silicon substrate

Nikfarjam, A ; Sharif University of Technology | 2010

989 Viewed
  1. Type of Document: Article
  2. DOI: 10.1016/j.sna.2010.06.015
  3. Publisher: 2010
  4. Abstract:
  5. We fabricated gas sensors based on field ionization from multiwalled carbon nanotube (MWCNT) arrays grown on porous silicon templates. MWCNTs were grown through thermal chemical vapor deposition. We measured breakdown voltages, discharge and pre-discharge currents of the device for various gases in different concentrations. Our gas ionization sensors (GIS) presented good sensitivity, selectivity and short response time. The GISs based on porous substrates showed higher discharge current and good mechanical stability in comparison to those which were fabricated on polished silicon substrates. Additionally, we applied a high electric field to align CNTs. This increased the pre-breakdown current. Also, introducing humidity in dry air caused enhancement in pre-breakdown current and lowered breakdown voltage. We also used our GIS in monitoring gas mixtures
  6. Keywords:
  7. Multiwalled carbon nanotube ; Breakdown voltage ; Carbon nanotube array ; Discharge currents ; Dry air ; Field ionization ; Gas ionization sensor ; Gas sensors ; High electric fields ; Porous silicon substrates ; Porous substrates ; Prebreakdown ; Short response time ; Silicon substrates ; Thermal chemical vapor deposition ; Carbon nanotubes ; Chemical sensors ; Electric breakdown ; Electric fields ; Fabrication ; Gases ; Geographic information systems ; Mechanical stability ; Multiwalled carbon nanotubes (MWCN) ; Particle detectors ; Porous silicon ; Substrates ; Ionization of gases
  8. Source: Sensors and Actuators, A: Physical ; Volume 162, Issue 1 , 2010 , Pages 24-28 ; 09244247 (ISSN)
  9. URL: http://www.sciencedirect.com/science/article/pii/S0924424710002761?np=y&npKey=8932462059a286e32346a2d196b7b0c231a60b5a457ae450bbbfd53a35664205