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Micro-optoelectromechanical systems accelerometer based on intensity modulation using a one-dimensional photonic crystal

Sheikhaleh, A ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.1364/AO.55.008993
  3. Publisher: OSA - The Optical Society
  4. Abstract:
  5. In this paper, we propose what we believe is a novel sensitive micro-optoelectromechanical systems (MOEMS) accelerometer based on intensity modulation by using a one-dimensional photonic crystal. The optical sensing system of the proposed structure includes an air-dielectric multilayer photonic bandgap material, a laser diode (LD) light source, a typical photodiode (1550 nm) and a set of integrated optical waveguides. The proposed sensor provides several advantages, such as a relatively wide measurement range, good linearity in the whole measurement range, integration capability, negligible cross-axis sensitivity, high reliability, and low air-damping coefficient, which results in a wider frequency bandwidth for a fixed resonance frequency. Simulation results show that the functional characteristics of the sensor are as follows: a mechanical sensitivity of 119.21 nm/g, a linear measurement range of ±38g and a resonance frequency of 1444 Hz. Thanks to the above-mentioned characteristics, the proposed MOEMS accelerometer is suitable for a wide spectrum of applications, ranging from consumer electronics to aerospace and inertial navigation
  6. Keywords:
  7. Accelerometers ; Bandwidth ; Consumer electronics ; Light sources ; Modulation ; MOEMS ; Natural frequencies ; Optical multilayers ; Resonance ; Tracking (position) ; Cross-axis sensitivity ; Functional characteristics ; Integrated optical waveguides ; Mechanical sensitivity ; Micro opto electro mechanical systems ; One dimensional photonic crystal ; Optical sensing systems ; Photonic bandgap materials ; Photonic crystals
  8. Source: Applied Optics ; Volume 55, Issue 32 , 2016 , Pages 8993-8999 ; 1559128X (ISSN)
  9. URL: https://www-osapublishing-org.ezp2.semantak.com/ao/abstract.cfm?uri=ao-55-32-8993