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Vibration control of AFM tip for nano-manipulation using combined sliding mode techniques

Delnavaz, A ; Sharif University of Technology | 2007

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  1. Type of Document: Article
  2. DOI: 10.1109/NANO.2007.4601150
  3. Publisher: 2007
  4. Abstract:
  5. Atomic force microscope (AFM) can be used as nanorobotics manipulation tool for nano particle positioning, pushing, indenting, cutting and etc. control the vibration behavior of AFM and make the micro-cantilever tip track specified trajectory is very crucial to appropriately manipulate particles in nano-scales. The novel combined sliding mode approach has been investigated in this paper to obtain robust nonlinear control scheme for nanomanipulation. First (classical) and second order (SOSM) sliding mode techniques have been developed and applied to nonlinear dynamical and uncertain model of AFM cantilever beam to track the desired trajectories. The simulation results show chattering in reaching phase of classical sliding mode and undesired trajectory twisting in sliding phase of SOSM. Hence, combined first and second order sliding mode is proposed to achieve robust chattering-free vibration control of AFM tip. © 2007 IEEE
  6. Keywords:
  7. Atomic force microscopy ; Cantilever beams ; Extreme ultraviolet lithography ; Lattice vibrations ; Nanorobotics ; Nanotechnology ; Robotics ; Technology ; Trajectories ; Vibration control ; Vibrations (mechanical) ; AFM cantilevers ; Atomic force microscope (AFM) ; Free vibration control ; International conferences ; Microcantilevers ; Nanoparticles ; Nanomanipulation ; Robust nonlinear control ; Second order sliding mode ; Second orders ; Simulation results ; Sliding mode techniques ; Sliding modes ; Specified trajectory ; Uncertain modeling ; Vibration behaviors ; Imaging techniques
  8. Source: 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Hong Kong, 2 August 2007 through 5 August 2007 ; 2007 , Pages 106-111 ; 1424406080 (ISBN); 9781424406081 (ISBN)
  9. URL: https://ieeexplore.ieee.org/document/4601150