Sharif Digital Repository

Developing new micro and nano devices, help us instruction micro and nano devices in very small scales. Also nano technology improved in recent decades especially in century 21th. These devices contained many important members, such as micro and nano filters, micro channels, sensors, and electrical chipsets. Navier-Stockes equations with slip and no-slip conditions can not used in transition and free molecular regimes. Since most of the MEMS and NEMS devices working in slip and transition regimes, then we must using DSMC for simulation these devices. DSMC is a physically method and working on the physics bases. Also it was derived from Boltzmann equations by Bird. In this study, we want...