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micromirrors
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Dynamic and Vibration Analysis of Micro-Mirrors Made of FGM
, M.Sc. Thesis Sharif University of Technology ; Ahmadiyan, Mohammad Taghi (Supervisor) ; Firoozbakhsh, Keikhosrow (Supervisor)
Abstract
The important role of MEMS devices in optical system has initiated the development of a new class of MEMS called Micro-Opto-Electro-Mechanical systems (MEOMS), which mainly includes micromirrors and torsional microactuators. These devices have found variety of application in optical switches, display, micro scanning mirrors, optical cross-connects interferometry, spectroscopy, aberration correction and biomedical imaging. In this project, the dynamic behavior of electrostatic micromirrors under the effect of intermolecular surface forces and squeezed film damping are studied. The prior art published in the literature have mainly used pure torsion models. In a pure torsion, just the torsion...