Sharif Digital Repository

The fabrication of future electronic and optical devices will require advanced nanofabrication techniques that realize high spatial resolution and high precision in controlling size and position, and that are applicable to various materials. Near-field CVD (NF-CVD) was proposed to solve these problems with no need to perform nanolithography prcesses. NFCVD system has two major subsystems, first vacuum chamber and gas distribution system for delivering parent gases to the chamber and second, a nanopositiong system to keep the probe and the sample in the constant systems.In this dissertation we have set up a piezoelectric nanopositiong system and its driver modules. The positioning accuracy...