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Modeling and Simulation of High-Speed Atomic Force Microscope

Bahrami, Mohammadreza | 2010

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  1. Type of Document: M.Sc. Thesis
  2. Language: English
  3. Document No: 41058 (58)
  4. University: Sharif University of Technology, International Campus, Kish Island
  5. Department: Science and Engineering
  6. Advisor(s): Ramezani, Asghar; Ghaemi Osgoui, Kambiz
  7. Abstract:
  8. This thesis is aimed at the modeling and control of atomic force microscope (AFM) in order to improve the scanning speed and achieving video-rate imaging to realize the real-time observation of dynamic phenomena at the nanoscale. The lumped parameter model of the AFM in the non-contact operation mode is studied in this project. The tip-sample interaction is the Van der Waals force, which makes the model nonlinear. Two mathematical models of the AFM cantilever are derived and investigated in order to gain detailed insights into the system dynamics. These models are tip excited and base excited cantilever. The former is solved by the method of multiple scales and the latter is analyzed by the utilizing averaging method to obtain the frequency response equation. Then, the effects of the nonlinearity, amplitude of excitation, and damping coefficient on the frequency response are studied. In the next step, the mechanical scanner is modeled and studied to improve the scanning speed. A new mechanical scanner design that allows scanning speeds faster than the current commercial AFM systems is proposed. The resonance frequency of the new scanner is obtained by ABAQUS/CAE. Then, a controller is designed and the feedback operation of the high-speed AFM is studied. The performance of the high-speed AFM is compared with the conventional one via simulations
  9. Keywords:
  10. Atomic Force Microscopy (AFM) ; Modeling ; Scanning Speed Improve ; Scanner Design ; Controller Design

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