Loading...

Optimization and Fabrication of a Linear Ultrasonic Piezoelectric Motor for Nanopositiong Purposes

Sanikhani, Hamed | 2011

514 Viewed
  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 41581 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Akbari, Javad; Asghari, Mohsen
  7. Abstract:
  8. Nanopositioning systems are devices with the ability of moving objects within nanometer resolution. In the recent years according to the advancements in the nanotechnology fields, there is an urgent and growing need for these systems as precision motion drivers. In the most of the nanopositiong devices some active materials such as piezoelectric elements are widely used as actuators. Piezoelectric materials can generate a mechanical deformation proportional to the applied electrical field. Therefore, theoretically these devices have the ability to set the desired position with the infinite precision.Design, optimization and fabrication of an ultrasonic piezoelectric motor are performed in this work. This motor should be able to generate a uniform linear motion in a slider with the acceptable speed and thrust force. Due to the absence of backlash in the structure of the motor, a nano-scale resolution in the operation of the motor would be expected, if an appropriate driver is used to control the signal of the piezoelectric elements. The main advantage of this work is the localization of the fabrication technology of this type of nanopositiong systems within the country.In the present work, after a review on the background and the basic concepts of the research topic, the processes of design, modeling and analysis of the motor is described. In the next step, the goals of the optimization are determined in order to the appropriate operation of the motor and then, the geometrical dimensions of the motor are found using genetic algorithm as an optimization method. Fabrication procedure and testing setup is discussed in the next sections. Finally the characteristics of the motor such as natural frequencies, speed, thrust braking forces is determined according to the test results.
  9. Keywords:
  10. Piezoelectric ; Nanopositioning ; Vibration Mode ; Linear Ultrasonic Motor

 Digital Object List

 Bookmark

No TOC