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Abedi, Samira | 2011

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Type of Document: M.Sc. Thesis
Language: Farsi
Document No: 41680 (06)
University: Sharif University of Technology
Department: Chemical and Petroleum Engineering
Advisor(s): Bozorgmehri Bozarjmehri, Ramin
Abstract:
A steady laminar flow coupled with heat transfer and chemical reaction corresponding to metalorganic chemical vapor deposition (MOCVD) in an axis-symmetrical rotating disc reactor has been simulated in a detail manner based on Computational Fluid Dynamics approach. The simulation results have been validated with the benchmark solutions obtained from the literatures for the corresponding casestudy.Three decision variables have been used whose optimum values are sought inorder to minimize the nonuniformity of the film on the susceptor. Their optimum values have been obtained by the elder-Mead algorithm which is a geometric optimization method which does not require gradient of the objective function. The obtained optimum configuration result in a twofold decrease in thickness deviation of deposited film (i.e., from 29.8% to 16.5% ).
Keywords:
Simulation ; Transport Phenomena ; Optimization ; Nelder-Mead Method ; Computational Fluid Dynamics (CFD) ; Organometallic Chemical Vapor Deposition Process

No TOC