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Vibration and Dynamic Analysis of Electrostatically Aactuated Micro and Nano Beams Using Nonlocal Theory

Pasharavesh, Abdolreza | 2011

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 42573 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Ahmadiyan, Mohammad Taghi; Zohoor, Hassan
  7. Abstract:
  8. Micro and nano electromechanical systems technology has experienced lots of progress in recent years. These systems are widely used in sensors and actuators due to their small size low weight and low energy consumption. Electrostatically actuation is one of the simplest and most prevalent methods of actuation and sensing in these systems. Electrostatically actuated micro and nanobeams are used in many devices such as micro and nano switches, resonators, signal filters, tunable capacitors, pressure and mass sensors, etc. Experimental results and measurements have shown that classical theories contain error in prediction of static and dynamic behavior of these systems and application of novel methods in analysis of them seems necessary. One of the procedures of accuracy improvement in behavior analysis of such systems is application of nonlocal theories in their modeling. According to nonlocal theories stress at a point is a functional of strain in that point and all points around it. In this study, static and dynamic behavior and vibration of electrostatically actuated micro and nano beams with and without considering beam material electrical resistivity is investigated using nonlocal theories. The governing nonlinear equation is reformulated implementing nonlocal theories and is solved using numerical and semi-analytical methods such as differential quadrature and homotopy perturbation methods. Then obtained results are compared with the results of classical theories. Results indicate that nonlocal effect can highly influence the behavior of these systems especially in the case of nano scale systems
  9. Keywords:
  10. Electrostatic Actuation ; Pull-in Phenomenon ; Nonlinear Vibration ; Galerkin Method ; Nonlocal Theory

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