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Dynamics and Vibration Analysis of An FGM Microresonator Based on Resonantly Interacting Flexural-Torsional Modes

Shoghmand Nazarloo, Ahad | 2012

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 43342 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Ahmadian, Mohammad Taghi; Asempour, Ahmad
  7. Abstract:
  8. Resonantly actuated microstructures known as microresoantors, are the basic parts of many of MEMS devices such as highly sensitive pressure sensors, mass sensors, biosensors, RF filters, AFMs , ... . Vibration analysis of microresonators specially that of the coupled in-plane and out-f-plane motions has draught many attentions, during recent years. The purpose of the present thesis was to analyze the vibration and dynamics of an FGM microresonator consisted of a clamped-clamped beam with a relative massive pedal attached to the middle of the beam. By modeling the system initially, linear natural in-plane and out-of-plane frequencies and associated mode shapes are obtained. Results are compared with those in the literature and numerical technique using a commercial finite element software, where an excellent agreement is achieved. Dynamic equations of motion of the microresonator are derived. Static instability and the possibility of internal resonance between the two modes is investigated and finally the approximate averaged equations of motion are derived. The results indicate that there exists a pedal length for every particular FG material profile, that causes the microresoantor to have an internal resonance of 1:2 ratio between its in-plane flexural mode and out-of-plane torsional mode. With a proper selection of the FG material profile it is possible to obtain a wide range of resonance frequency for the micoresonator, without changing the dimensions of the structure. This unique feature can be applied in the design of mass sensors and as well as RF filters
  9. Keywords:
  10. Functionally Graded Materials (FGM) ; Bifurcation ; Internal Resonance ; Microresonator ; Pull-in Voltages

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