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Nonlinear Analysis of Pull-in, Contact Time and Dynamic Behavior of Microswitches Under Static and Dynamic Electric Force With Movable Base

Karimzade, Ali | 2012

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 43463 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Ahmadian, Mohammad Taghi
  7. Abstract:
  8. Micro electromechanical systems (MEMS) such as sensors and actuators are gaining more popularity in recent years. These systems have different application in automation, medicine and other industries. Mechanical structures are governed by electrical systems in MEMS devices and this is one of the challenges of MEMS studies. Usually these systems made by one deformable beam or plate over a fixed substrate. Due to applied voltage between substrate and deformable plate or beam, the deformable plate deflects toward the fixed substrate. The voltage at which the system becomes unstableis called pull-in voltage. Pull-in voltage is the most important characteristics of MEMS beyond which pull-in takes place. In the design of these systems pull-in voltage is one of the desired characteristics of the design and reduction of the energy consumption is also a concern in manufacturing of these systems. Capillary, Casimir and Van der Waals forces also play an important role in MEMS due to proximity of the plates. In the present work the substrate is also considered deformable and the system’s characteristics such as pull-in voltage and contact time is investigated by using extended Kantorovich method. Application of these technique causes the partial differential equation of the system becomes an ordinarydifferential equation.The initial guess function in the extended Kantorovich method does not need to satisfy boundary condition and results also converge fast. Initially nonlinear governing equation of the systemis solved statically and the results show that by application of inplane loading the pull-in voltage can be controlled. Increase in Capillary, Casimir and VdW forces decrease the pull-in voltage. Results also show that increasing aspect ratioincreases the natural frequency. Finally, by using the mode shapes obtained in vibration analysis of the system, the dynamic behavior of the system is investigated. It is also shown that having deformable substrate causes accurance of pull-in voltage and contact time reducing drastically
  9. Keywords:
  10. Extended Kantorovich Method ; Capillary Force ; Static ; Dynamics ; Vibration ; Microplate ; Pull-in Phenomenon ; Casimir Force ; Van Der Waals Model

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