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Ambient Vibrations Effect on Sensitive Equipment Using Passive and Active Control Method

Yavari Foroushani , Ali | 2012

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 43805 (09)
  4. University: Sharif University of Technology
  5. Department: Civil Engineering
  6. Advisor(s): Bakhshi, Ali
  7. Abstract:
  8. Today, with improvements in industries such as the sensitive equipment’ industries and the optics industries which need great precision for their optimum performance, the need for a vibration-free environment is felt more than ever. The main objective in this thesis is the effective reduction of the effects of ambient vibrations on points on an optical concrete table using active control. In this research, other than separating the table with the passive method, the reduction of vibrations with active control and the LQR algorithm is investigated. In order to study the dynamic characteristics of the table and to observe the active control process better and more carefully, finite element analysis was done and the modal characteristics of the table were found using MATLAB. The results were checked using experimental research of mahboobi and ABAQUS. The reduction of the vertical speed of the points on the table is our goal in this project. The dynamic equations governing the system’s dynamic stability were taken to state space and eventually by presenting an effective method and using the Kalman filter estimator and by applying the LQR algorithm on the system’s modal coordinates, the speed of points on the table decreased significantly. Without applying any controlling forces to the table, it encounters problems at low frequencies and rigid modes and in some ranges of frequency even the VC-A vibrational criterion is not satisfied. Also, in frequencies less than 16Hz the VCD and VC-E criteria are not satisfied. By applying a controlling force in an appropriate range all vibrational criteria are satisfied for frequencies between 0 and 100Hz and the table is controlled. Thus, the most accurate devices will be able to be installed on it and work with high performance. Even by applying a smaller force all vibrational criteria except for VC-E will be satisfied in frequencies we are interested in
  9. Keywords:
  10. Sensitive Equipments ; Modal Analysis ; Linear Quadratic Requlator (LQR) ; kalman Filter Estimator ; Criterion Curves

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