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Possiblity and Implementation of Closed Loop Controller to Control a 2-DOF Electrostatic Torsional Micro-mirror

Basiriani, Behnam | 2012

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 43895 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Alasti, Aria; Salarieh, Hassan
  7. Abstract:
  8. Nowadays, Specific applications of micro-mirrors in MEMS industry as actuartors have been found. In optical networks, these instruments are used to transfer data between optical fibers as an optical switch. According to the high desired precision for the relevant applications, many different aspects should be considered in controlling of these systems. Some of these criteria include: high speed response, overshoot elimination, minimal energy consumption by regulating the system inputs, minimal vibration, consideration of system uncertainities and some unmeasurable state variable, and system rubostness against environmental disturbances. In this research by addressing all of these limitations, a dynamical model of a 2DOF torsional electrostatical micro-mirror, in which the bending effects are regarded, is used to design a closed loop controller. In this way, two nonlinear control approaches, include of sliding mode and nonlinear PD, were applied to control the system beyond the Pull-in point, unstable domain, and compared with a PID controller. The results show desired response of these designed controllers. In addition, due to estimation of a non-measurable state variable, used in control input, a nonlinear observer is designed which shows good performance through the micro-mirror operating range
  9. Keywords:
  10. Microelectromechanical Systems (MEMS) ; Pull-in Phenomenon ; Sliding Mode Control ; Computed Torque Method (CTM) ; Torsional Electrostatical Micromirror

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