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Nonlinear Analysis and Design of Estimation and Filtering System for a MEMS Gyroscope with Parametric Excitation

Fazlyab, Mahyar | 2013

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 44467 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Salarieh, Hassan; Alasti, Aria
  7. Abstract:
  8. Recently, parametric excitation has been proposed and experimentally proven to provide micro gyroscopes with robustness to parameter variations and enhancement of sensitivity [L.A. Oropeza-Ramos, C.B. Burgner, K.L. Turner, Robust micro-rate sensor actuated by parametric resonance, Sensors and Actuators A: Physical, 152 (2009) 80-87].The first part of this thesis aims at investigating the nonlinear dynamics of MEMS vibratory gyroscopes with parametric excitation which can be represented by a minor variation of nonlinear Mathieu equation coupled to a Duffing oscillator. Our approach is based on analytical frequency response derivation via method of multiple time scales. Stability of responses, maximum sensitivity condition, mechanical scale factor and effect of physical parameters on sensitivity and bandwidth of the gyroscope are fully investigated. Analytical results have also been verified by numerical simulations. Based on the results, the mechanical design of the gyroscope considering microfabrication limitations has also been pursued. This part offers practical design rules for a systematic design of parametrically excited MEMS gyroscopes. In the second part, unknown and/or uncertain parameters of the gyroscope including unknown angular rate are estimated using nonlinear versions of Kalman Filter (EKF and UKF) and recursicve least squares algorithm (RLS). Both constant and time varying are treated thoroughly. It is found that highly varying angular velocity can be estimated in real time by proper tuning of the filter
  9. Keywords:
  10. Nonlinear Mathieu Equation ; Extended Kalman Filter ; Recursive Least Square Estimation ; Parametric Analysis ; Gyroscope ; Microelectromechanical Systems (MEMS) ; Unscented Kalman Filter ; Multiple Time Scalse

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