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Fabrication, Visualization and Calibration of a Novel TEM Microactuator

Takht Abnousi, Marjan | 2012

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  1. Type of Document: M.Sc. Thesis
  2. Language: English
  3. Document No: 45775 (58)
  4. University: Sharif University of Technology, International Campus, Kish Island
  5. Department: Science and Engineering
  6. Advisor(s): Alasti, Aria
  7. Abstract:
  8. Nowadays precise nano positioning plays an important role in micro systems. Precise positioning at nano scale plays a basic role in nano science such as micro -robotics, solid state physics and photonics. Manipulating matter in a molecular scale creates a dramatic change and restruturing in macro scale engineering. During this research a novel TEM micro actuator is designed and fabricated based on calibration criteria. This structure was fabricated with SOI wafer (silicon on insulator) in micro scale level for the first time in Iran. This compliant consists of 12 TEM actuators end in 3DOF (In-plane) motion. The new micro actuator operates based on the thermal expansion due to voltage. Each TEM actuator can move in 2 degrees of freedom with bilateral motion for each. These abilities are very important for increasing the work space. In the fabrication phase, we made this mechanism in the Nano electronic laboratory of Tehran University. Calibration research was done with the consultation of Uremia and Tehran university professors. The system fabricated monolithic flexible with central micro/nano positioner circular platform. This structure was fabricated by both wet and dry etching methods in one layer and symmetrically. After fabrication elementary test based on green laser diffraction under the probe station proved the movement. Then Wire bonding process applied with gold wire on the structure which is letting us to use it as a micro chip in a circuit for scanning. Different method of displacement measurement investigates like interferometry, sensors and scanners. At last a non contact AFM is suggesting for this case
  9. Keywords:
  10. Silicones ; Micro Actuator ; Thermoelectromechanical Actuator ; Nano Positioner ; Diffraction Phenomena ; Etching

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