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Electromechanical resonators based on electrospun ZnO nanofibers
Fardindoost, S ; Sharif University of Technology
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- Type of Document: Article
- DOI: 10.1117/1.JMM.13.4.043011
- Abstract:
- We present fabrication, characterization, and experimental results describing electrical actuation and readout of the mechanical vibratory response of electrospun ZnO nanofibers. For a fiber with an approximate radius of 200 nm and a length of 70 ìm, a resonance frequency around 3.62 MHz with a quality factor (Q) of about 235 in air at ambient conditions is observed. It is shown that the measured frequency of the resonance is consistent with results from finite element simulations. Also, the measurements were performed in an enclosed chamber with controlled levels of ethanol vapor. The adsorption of ethanol causes a shift in the resonance frequency of the fibers, which can be related to the concentration of ethanol vapor for sensing purposes
- Keywords:
- Electromechanical resonator ; ZnO ; Ethanol ; Nanofibers ; Natural frequencies ; Resonance ; Resonators ; Zinc oxide ; Adsorption of ethanol ; Electrical actuation ; Electromechanical resonators ; Ethanol sensing ; Finite element simulations ; Resonance frequencies ; Vibratory response ; Electromechanical devices
- Source: Journal of Micro/ Nanolithography, MEMS, and MOEMS ; Vol. 13,Issue. 4 , 2014 ; ISSN: 19325150
- URL: http://nanolithography.spiedigitallibrary.org/article.aspx?articleid=1935541