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Numerical and Experimental Modeling of Moving Bodies at Clean Room

Fazel Neishabouri, Ali | 2015

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 47176 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Hassan Saidi, Mohammad; Mozafari, Ali Asghar
  7. Abstract:
  8. In the recent decades, cleanrooms have found growing applications in broad range of industries such as pharmacy and microelectronics. Concerns about negative effects of the contaminant exposure on the human health and product quality motivate many researchers towards understanding of the airflow and contaminant distribution through these environments. With an improvement in computational capacity of the computers, computational fluid dynamics (CFD) technique has become a powerful tool to study the engineering problems including indoor air quality (IAQ). In this research, indoor airflow in a full-scale cleanroom is investigated numerically using Eulerian–Eulerian approachand the results are compared withcorresponding experimental results. To evaluate the ventilation system effectiveness, a new index, called removal efficiency, is introduced which takes all aspects of the problem into account. The results show that application of the hood and isolators in the room and the method of air supply have a great influenceon the contaminant dispersion through the room. Based on the results, the removal efficiency in the working area improved when the hood or isolators are applied or when a 4 way diffuser is used in the air inlet of the room. This study and its results may be useful to gain better understanding of the contaminant distribution in the clean rooms and its effects on the indoor air quality
  9. Keywords:
  10. Clean Room ; Computational Fluid Dynamics (CFD) ; Eulerian-Eulerian Approach ; Isolator Design ; Contaminant Distribution ; Removal Efficiency ; Hood

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