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Full operational range dynamic modeling of microcantilever beams

Abtahi, M ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.1109/JMEMS.2013.2256108
  3. Abstract:
  4. Microcantilever beams are frequently utilized in microelectromechanical systems. The operational range of microcantilever beams under electrostatic force can be extended beyond pull-in in the presence of an intermediate dielectric layer, which has a significant effect on the behavior of the system. Three possible configurations of the beam over the operational voltage range are floating, pinned, and flat configurations. In this paper, a systematic method for deriving dynamic equation of microcantilevers for all configurations is presented. First, a static study is performed on deflection profile of the microcantilever under electrostatic force. After that, a polynomial approximate shape function with a time-dependent variable for each configuration is defined. Using Hamilton's principle, dynamic equations of microcantilever in all configurations are derived. A comparison between modeling results and previous experimental data that has been used for validation of the model shows a good agreement
  5. Keywords:
  6. Dynamic modeling ; Deflection profiles ; Floating ; Hamilton's principle ; Microcantilever beams ; Operational voltage ; Pinned and flat configurations ; Systematic method ; Time-dependent variables ; Chemical sensors ; Composite micromechanics ; Dynamic models ; Electromechanical devices ; Electrostatic devices ; Electrostatic force ; MEMS
  7. Source: Journal of Microelectromechanical Systems ; Volume 22, Issue 5 , May , 2013 , Pages 1190-1198 ; 10577157 (ISSN)
  8. URL: http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6518127