Loading...

Nonlinear analysis of pull-in phenomenon and maximum deflection of MEMS with movable base under capillary and Van der Waals forces

Karimzade, A ; Sharif University of Technology | 2012

658 Viewed
  1. Type of Document: Article
  2. DOI: 10.1115/IMECE2012-89291
  3. Publisher: 2012
  4. Abstract:
  5. In the analysis of micro structures, due to proximity of the elements Van der Waals forces plays an important role on the dynamics of the structure. In the modeling process a similar approach should be considered for the capillary effect caused by the moisture in the environment. Microplates and microbeams are used widely in the design and manufacturing of sensors and actuators. These structures are usually made of a cantilever beam or plate along with a fixed substrate. The cantilever beam usually deflects due to applied voltage. By increasing the voltage the pull-in phenomenon takes place. It is believed that the short contact time is one the important characteristic of any micro switches. In this paper allowing the substrate to be movable in the vertical direction and considering the combined effect of capillary and Van der Waals (VdW) effects maximum deflection and pull-in phenomena in terms of applied voltage is evaluated. The minimum potential energy is utilized to find the nonlinear differential equations of movable based micro-electro-mechanical systems (MEMS). Results show that pull-in voltage decreases drastically for fully clamped micro plates considering capillary and VdW effect
  6. Keywords:
  7. Capillary force ; Extended Kantorovich method ; Micro electromechanical system (MEMS) ; Minimum potential energy ; Movable base ; Nonlinear differential equation ; Pull-in voltage ; Sensors and actuators ; Cantilever beams ; Chip scale packages ; Differential equations ; Mechanical engineering ; MEMS ; Nonlinear analysis ; Plates (structural components) ; Van der Waals forces
  8. Source: ASME International Mechanical Engineering ACongress and Exposition, Proceedings (IMECE), 9 November 2012 through 15 November 2012 ; Volume 9, Issue PARTS A AND B , November , 2012 , Pages 351-356 ; 9780791845257 (ISBN)
  9. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1751737