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Developing a new pressure measurement mechanism based on squeeze film damping effect

Ghafari, A ; Sharif University of Technology | 2012

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  1. Type of Document: Article
  2. DOI: 10.1109/ICCIAutom.2011.6356763
  3. Publisher: IEEE Computer Society , 2012
  4. Abstract:
  5. This paper introduces a novel approach for measuring low pressures based on MEMS technology. In this technique the mechanism of squeeze film damping is used. A voltage is applied to a fixed-fixed MEMS beam and its step response is obtained; for each pressure there is a different response. Then the settling time is measured and we can relate each settling time with a defined pressure. Here, first we use some equations to relate pressure with the squeeze film damping effect; after that we use a micro beam model and relate its parameters with pressure. Then we use numerical analysis and simulation to show the procedure of pressure measuring. All simulation results are shown and discussed
  6. Keywords:
  7. MEMS ; Pressure ; Pressure measurement ; Step response ; Analysis and simulation ; Low pressures ; Measurement mechanism ; MEMS technology ; Micro beams ; Pressure measuring ; Settling time ; Squeeze-film damping ; Damping
  8. Source: Proceedings - 2011 2nd International Conference on Control, Instrumentation and Automation, ICCIA 2011, 27 December 2011 through 29 December 2011 ; Dec , 2012 , Pages 800-803 ; ISBN: 9781467316897
  9. URL: http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6356763