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Resonant frequency and sensitivity of an AFM microcantilever modeled by the non-local theory

Khosravani, E ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.1115/IMECE2011-63466
  3. Abstract:
  4. In this paper, utilizing the non-local theory, the resonant frequency and sensitivity of an AFM microcantilever are investigated. To that end, the governing equation of motion and corresponding boundary conditions are obtained using the variational approach. Afterwards, the resonant frequency and sensitivity of the AFM microcantilever are derived analytically and depicted in some figures versus the contact stiffness of the sampling surface. The results of the current model are compared to those of the classical theory. The comparison shows that the difference between the results of the non-local theory and those of the classical theory is significant when the non-local parameter is high but it diminishes as the non-local parameter decreases
  5. Keywords:
  6. AFM ; Classical theory ; Contact stiffness ; Current models ; Governing equations ; Micro-cantilevers ; Nonlocal ; Nonlocal theory ; Variational approaches ; Atomic force microscopy ; Composite micromechanics ; Equations of motion ; Exhibitions ; Mechanical engineering ; Natural frequencies
  7. Source: ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011, 11 November 2011 through 17 November 2011 ; Volume 11 , November , 2011 , Pages 239-245 ; 9780791854976 (ISBN)
  8. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1645622