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Investigation of the oscillatory behavior of electrostatically-Actuated microbeams

Mojahedi, M ; Sharif University of Technology | 2010

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  1. Type of Document: Article
  2. DOI: 10.1115/IMECE2010-39589
  3. Publisher: 2010
  4. Abstract:
  5. Vibrations of electrostatically-Actuated microbeams are investigated. Effects of electrostatic actuation, axial stress and midplane stretching are considered in the model. Galerkin's decomposition method is utilized to convert the governing nonlinear partial differential equation to a nonlinear ordinary differential equation. Homotopy perturbation method (i.e. a special and simpler case of homotopy analysis method) is utilized to find analytic expressions for natural frequencies of predeformed microbeam. Effects of increasing the voltage, midplane stretching, axial force and higher modes contribution on natural frequency are also studied. The anayltical results are in good agreement with the numerical results in the literature
  6. Keywords:
  7. Analytic solutions ; Homotopy analysis method ; Homotopy perturbation method ; Mems ; Analytic solution ; Decomposition methods ; Electrostatic actuation ; Homotopy analysis methods ; Homotopy Perturbation Method (HPM) ; Nonlinear ordinary differential equation ; Nonlinear partial differential equations ; Vibrations ; Electrostatic actuators ; Natural frequencies ; Ordinary differential equations ; Mechanical engineering
  8. Source: ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), 12 November 2010 through 18 November 2010, Vancouver, BC ; Volume 10 , 2010 , Pages 619-626 ; 9780791844472 (ISBN)
  9. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1616884