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Frequency response behavior of microcantilevers in tapping-mode Atomic Force Microscopy

Delnavaz, A ; Sharif University of Technology | 2010

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  1. Type of Document: Article
  2. DOI: 10.1115/DETC2010-28196
  3. Publisher: 2010
  4. Abstract:
  5. Distributed-parameters vibration model of microcantilevers in tapping-mode Atomic Force Microscopy (AFM) is developed and is shown to be highly nonlinear. The question of why these nonlinearities are important and how they influence the predicted frequency response behavior of the cantilevers is addressed by comparing the results of developed model with a simple lumpedparameters model that has been extensively studied in the literature so far. The interaction forces between the microcantilever tip and the sample is supposed to be the same in both models and consist of attractive and repulsive interaction force regimes. In addition, experimental measurements are provided for a typical microcantilever-sample system to demonstrate the superiority of distributed-parameters formulation over the lumped-parameters model to predict the frequency response behavior of the AFM prob. The results indicate that the nonlinear continuous model is more accurate particularly in the estimation of the saturated amplitude and frequency zone in which the tip-sample contact occurs
  6. Keywords:
  7. AFM ; Continuous models ; Developed model ; Experimental measurements ; Frequency zones ; Highly nonlinear ; Interaction forces ; Lumped-parameters models ; Micro-cantilevers ; Repulsive interactions ; Tapping-mode atomic force microscopy ; Tip-sample contact ; Vibration model ; Atomic force microscopy ; Chemical sensors ; Composite micromechanics ; Design ; Frequency estimation ; Mathematical models ; Nanosystems ; Frequency response
  8. Source: Proceedings of the ASME Design Engineering Technical Conference, 15 August 2010 through 18 August 2010, Montreal, QC ; Volume 4 , 2010 , Pages 469-476 ; 9780791844120 (ISBN)
  9. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1612151