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Analytical and experimental frequency response analysis of microcantilevers subject to tip-sample interaction

Delnavaz, A ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.1115/DETC2009-86889
  3. Abstract:
  4. Improvement of microcantilever-based sensors and actuators chiefly depends on how comprehensively they are modeled and precisely formulated. Atomic Force Microscopy (AFM) is the most widespread application of microcantilever beam as a sensor, which is usually influenced by the tip-sample interaction force. For this, vibration of AFM microcantilever probe is analyzed in this paper, along with analytical, numerical and experimental investigation of the influence of the sample interaction force on the microcantilever vibration. Nonlinear integro-partial equation of microcantilever vibration subject to the tip-sample interaction is then derived and numerically simulated. Moreover, multiple time scales method is utilized to estimate the tip amplitude while it is vibrating near the sample. An experimental setup is developed using
  5. Keywords:
  6. AFM ; Experimental frequencies ; Experimental investigations ; Experimental setup ; Interaction forces ; Micro-cantilevers ; Microcantilever beams ; Multiple time scale ; Sensors and actuators ; Tip-sample interaction ; Atomic force microscopy ; Chemical sensors ; Composite micromechanics ; Dielectric properties ; Frequency response ; Nonlinear equations ; Vibration analysis
  7. Source: Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009, 30 August 2009 through 2 September 2009 ; Volume 6 , September , 2010 , Pages 575-581 ; 9780791849033 (ISBN)
  8. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1650183