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On the primary resonance of an electrostatically actuated MEMS using the homotopy perturbation method

Mojahedi, M ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.1115/DETC2009-86623
  3. Abstract:
  4. In this paper, primary resonance of a double-clamped microbeam has been investigated. The Microbeam is predeformed by a DC electrostatic force and then driven to vibrate by an AC harmonic electrostatic force. Effects of midplane stretching, axial loads and damping are considered in modeling. Galerkin's approximation is utilized to convert the nonlinear partial differential equation of motion to a nonlinear ordinary differential equation. Afterward, a combination of homotopy perturbation method and the method of multiple scales are utilized to find analytic solutions to the steady-state motion of the microbeam, far from pull-in. The effects of different design parameters on dynamic behavior are discussed. The results obtained by the presented method are validated by comparing with literature. Copyright © 2009 by ASME
  5. Keywords:
  6. MEMS ; AC harmonics ; Analytic solution ; Design parameters ; Galerkin's approximation ; Homotopy perturbation method ; Method of multiple scale ; Method of multiple scales ; Micro beams ; Nonlinear ordinary differential equation ; Nonlinear partial differential equations ; ON dynamics ; Predeformed ; Primary resonance ; Pull-in ; Circuit resonance ; DC power transmission ; Design ; Electrostatic actuators ; Electrostatic devices ; Electrostatic force ; Equations of motion ; MEMS ; Nonlinear equations ; Ordinary differential equations ; Partial differential equations ; Perturbation techniques
  7. Source: Proceedings of the ASME Design Engineering Technical Conference, 30 August 2009 through 2 September 2009, San Diego, CA ; Volume 6 , 2009 , Pages 569-574 ; 9780791849033 (ISBN)
  8. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1650181