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Characterization of sputtered NiTi shape memory alloy thin films

Sanjabi, S ; Sharif University of Technology | 2009

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  1. Type of Document: Article
  2. Publisher: 2009
  3. Abstract:
  4. During recent years, many investigations have been carried out to determine how to select different materials for the making of Micro Electro Mechanical Systems (MEMS) and bio-MEMS. The NiTi shape memory alloy thin film has been much regarded as a promising candidate for MEMS due. to its unique shape memory effect and high energy output. In this research, NiTi thin film was fabricated using a sputtering technique from separate elemental Ni and Ti targets. The characterizations of the deposited films were, investigated using different analysis techniques, such as Field Emission SEM, DSC, XR.D, electrical resistivity measurement and nanoindentation. © Sharif University of Technology, June 2009
  5. Keywords:
  6. Sputtering ; BioMEMS ; Deposited films ; Different analysis techniques ; Electrical resistivity measurements ; Field emission SEM ; High-energy output ; Microelectromechanical systems ; NiTi shape memory alloys ; NiTi thin film ; NiTi thin films ; Shape memory ; Sputtering techniques ; Characterization ; Electric conductivity ; Field emission ; Martensitic transformations ; MEMS ; Nanoindentation ; Shape memory effect ; Thin films ; Alloy ; Electrical resistivity ; Film ; Research work ; Scanning electron microscopy ; Shape ; X-ray diffraction
  7. Source: Scientia Iranica ; Volume 16, Issue 3 B , 2009 , Pages 248-252 ; 10263098 (ISSN)
  8. URL: http://scientiairanica.sharif.edu/article_3220.html