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A novel 3-dimentional ultra high precision positioning platform for micro machining cutting tools

Zabihollah, A ; Sharif University of Technology | 2017

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  1. Type of Document: Article
  2. DOI: 10.1109/ICCAR.2017.7942704
  3. Publisher: Institute of Electrical and Electronics Engineers Inc , 2017
  4. Abstract:
  5. Ultra-high precision machining is proposed by externally actuating the work piece in linear motions in the X-Y plane and linear motion in the Z-axis. To solve the problems in the machining process such as nonlinearity and low repeatability positioning accuracy of machining tools in a larger scale, a novel platform for cutting tools in micro machining based on electrostatic linear micromotors and piezoelectric stack actuator system is presented. © 2017 IEEE
  6. Keywords:
  7. Electrostatic linear micromotor ; Micromotors ; Piezoelectric sensor/actuator ; Ultra high positioning ; Electrostatic actuators ; Electrostatics ; Machining ; Micromachining ; 3-dimentional ; Piezoelectricity ; Precision engineering ; Robotics ; Linear micromotor ; Piezoelectric sensors ; Precision machining ; Ultra-high ; Cutting tools
  8. Source: 3rd International Conference on Control, Automation and Robotics, ICCAR 2017, 22 April 2017 through 24 April 2017 ; 2017 , Pages 284-288 ; 9781509060870 (ISBN)
  9. URL: https://ieeexplore.ieee.org/document/7942704