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Design and analysis of a 3-link micro-manipulator actuated by piezoelectric layers

Ahmadian, M. T ; Sharif University of Technology | 2017

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  1. Type of Document: Article
  2. DOI: 10.1016/j.mechmachtheory.2016.12.002
  3. Publisher: Elsevier Ltd , 2017
  4. Abstract:
  5. The purpose of this paper is to design and analyze a 3-link micro-device proposed as a micro-manipulator. This micro-manipulator includes 3 micro-beams as links connected to one another with no conventional or flexural joints. While the structure of the micro-manipulator is monolithic, end-effector workspace is achieved through deflection of links which is actuated by piezoelectric layers. By combining static analysis of the links through a multilayer piezoelectric beam model and kinematic analysis of the micro-manipulator, inverse kinematic has been solved utilizing the Taylor series expansion technique and the perturbation method. The obtained results through the present model reveal that the end-effector can provide a workspace of several microns with nano-accuracy. The required piezoelectric voltage for certain end-effector displacement was evaluated, and the error of inverse kinematic was investigated. A finite element model was also constructed to evaluate micro-manipulator behavior. The results show there is a good agreement between the analytical model and the finite element method. Avoiding complex geometry, the micro-manipulator offers a simple structure with a more feasible manufacturing process while it provides acceptable workspace for the end-effector with high accuracy. © 2017 Elsevier Ltd
  6. Keywords:
  7. Kinematics ; Micro-manipulator ; End effectors ; Inverse kinematics ; Inverse problems ; Manipulators ; Micromanipulators ; Perturbation techniques ; Piezoelectricity ; Static analysis ; Structural design ; Design and analysis ; Kinematic analysis ; Manufacturing process ; Perturbation method ; Piezoelectric ; Piezoelectric layers ; Piezoelectric voltage ; Taylor series expansions ; Finite element method
  8. Source: Mechanism and Machine Theory ; Volume 112 , 2017 , Pages 43-60 ; 0094114X (ISSN)
  9. URL: https://www.sciencedirect.com/science/article/pii/S0094114X16306462