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Application of direct simulation Monte Carlo for development of micro gas sensor

Gerdroodbary, M. B ; Sharif University of Technology | 2018

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  1. Type of Document: Article
  2. Publisher: Bulgarian Academy of Sciences , 2018
  3. Abstract:
  4. Development of a new micro gas sensor is essential for the analysis of the outcome of gas separation devices. In this paper, direct simulation Monte Carlo (DSMC) modeling of low-pressure gas sensor was performed to investigate the effect of physical parameters on the performance and main characteristics of this type of actuator in various operating conditions. Extensive parametric studies were done and the effect of ambient pressure, temperature and gap of arms were comprehensively investigated. Our findings showed that gap size significantly influences the flow features and force generation inside the sensor. © 2018 Bulgarian Academy of Sciences, Union of Chemists in Bulgaria
  5. Keywords:
  6. DSMC ; Gas sensor ; Knudsen force ; MEMS ; Rarefied gas
  7. Source: Bulgarian Chemical Communications ; Volume 50, Issue 2 , 2018 , Pages 298-305 ; 08619808 (ISSN)
  8. URL: http://bcc.bas.bg