Investigating Excitation and Geometrical Effects on the Behavior of Cold Plasma

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Haghkish, Nima | 2021

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Type of Document: M.Sc. Thesis
Language: Farsi
Document No: 53920 (05)
University: Sharif University of Technology
Department: Electrical Engineering
Advisor(s): Rashidian, Bijan; Faez, Rahim
Abstract:
Cold plasma has many applications in micro electronics industry. In this study, several examples of widely used plasmas systems have been investigated. First, the theory and physics of each type of plasma has been studied. Then the applications of each type have been discussed. Finally, the accuracy of the statements has been investigated using COMSOL multi physics software. In 1&2 D simulations the effects of all macroscopic parameters on plasma properties and its behavior have been investigated. In the design of plasma excitation source, plasma impedance is a very important parameter for maximum power transfer. Plasma impedance has been calculated with COMSOL software. Different modes of capacitive plasma, the transition mechanism from one mode to the other, and ways to change the transition voltage have been studied. In inductive plasma the interaction of plasma with charged particles that have been injected from outside, has been studied and simulated
Keywords:
Plasma ; Glow Discharges ; COMSOL Software ; Capacitive Plasma ; Direct Current Plasma ; Inductive Plasma ; Arc Plasma ; Corona Plasma ; Transition from Alpha to Gamma Mode ; Plasma Impedance

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