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Monitoring of Ion Implanter Radiation

Malekian Sourki, Mehrdad | 2021

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 54553 (05)
  4. University: Sharif University of Technology
  5. Department: Electrical Engineering
  6. Advisor(s): Rashidian, Bizhan
  7. Abstract:
  8. X-ray radiation is an ionizing radiation that can be produced under some conditions in an ion implanter and can have significant effects on equipment and personnel health. In this dissertation, we first examine the properties of ionizing radiations and their effects of electronic devices and discuss the general properties of common detectors. Next, Using Silvaco TCAD and GEANT4 we will simulate the interaction of ionzing radiation with energies up to 300 keV with electronic devices including a commercial off the shelf photo diode and a specialized x-ray detector and show that these devices can efficiently reveal informations of a radiation source to the user. Also, it has been shown that using an array of these detectors can in fact detect photons with higher energies. We have built several detectors based on charge collection from a PN diode and measurement of charge generated inside the gate oxide of CMOS in specialized and non specialized devices. The calculation for the protection that is required around the ion implanter in order to maintain the safety of personnel in the worst-case scenarios is also presented and is compared with the simualtions at the end
  9. Keywords:
  10. Radiation Detector ; Gamma Irradiation ; Geant4 Application for Tomographic (GATE)Emission ; X-ray Radiation ; Ionizing Radiation ; Ion Implantation

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