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Analysis, Design and Optimization of Ion Source for Ion Implantation System

Kiani, Samaneh | 2024

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 57048 (05)
  4. University: Sharif University of Technology
  5. Department: Electrical Engineering
  6. Advisor(s): Rashidian, Bizhan
  7. Abstract:
  8. Ion sources have changed significantly since ion implantation was first used commercially. High beam current and good performance with long lifetime are the keys in an ion source. Freeman ion sources are facing challenges such as the short lifetime of the filament, the single charge of the extracted ions. In the third chapter, these challenges and solutions for them are described. In this thesis, while examining different types of ion sources and comparing them with the combination and simulation of Freeman Varian 300XP ion source performance, an improved Freeman ion source is also presented. Also, the results obtained through simulation using Comsol 6.1 software and MATLAB program have been ensured. The simulations are done separately in the Comsol program in three dimensions, as well as the next two dimensional models. Then, to optimize the code, the MATLAB program is used to perform complex Comsol calculations, and lighter calculations are applied to the Comsol program. Selection of Comsol software and comparison of its accuracy and speed with other software are described in the fourth chapter. Optimum work points and communication analysis have been done. The amount of ion beam current has a significant effect on the variation of the filament radius and the pressure of the test chamber. For changing the cathode voltage by one volt, the ion beam current increases about ten times
  9. Keywords:
  10. Ion Implantation ; COMSOL Software ; Matlab Software ; Filament Lifetime ; Simulation Speed Optimization ; Ion Density Current ; Freeman Ion Source

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