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Design and Fabrication of Micro-Electrode Based Neural Probe

Irandoost, Alireza | 2024

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  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 57067 (05)
  4. University: Sharif University of Technology
  5. Department: Electrical Engineering
  6. Advisor(s): Fardmanesh, Mehdi
  7. Abstract:
  8. Neural probes, as brain-machine interface devices, are essential tools for recording electrophysiological signals or neural stimulation of a single neuron or a set of them. Nowadays, neural probes are widely used by cognitive and neuroscience researchers to understand brain functions in order to develop new treatments and therapies for neurological disorders. Making neural probes based on microelectrodes has the advantages of compatibility of their construction with the use of integrated circuit microfabrication technologies, as well as the ability to be made based on flexible materials. The purpose of this research is to design and manufacture a neural probe based on microelectrode to record brain signals. In this vein, two types of neural probes based on silicon and polyimide flexible film, with thicknesses of 150 and 50µm, respectively, have been fabricated and characterized using low-cost microfabrication techniques. 4 microelectrodes with a diameter of 30 µm, as well as the tracks and contact pads of the electrodes are made of a thin layer of gold, and corresponding tracks are covered with a thin insulating layer of SU-8. Two methods of electrochemical impedance spectroscopy and recording of simulated neuronal signals have been used to characterize the neural probe. The measured impedance of the microelectrodes with the value of 440kΩ was suitable for recording low-frequency local field potential signals resulting from the activity of a set of neurons. The in-vivo local field potential signals in the 0.5 to 7Hz frequency band were acquired from the brain of a Zebra Finch bird through surgical procedures in response to sound stimulation at the IPM Institute for Research in Fundamental Sciences. Finally, the performance of the neural probe was evaluated by comparing the obtained results with the signals recorded from a commercial tungsten electrode, demonstrating a high level of agreement and reliability in the recorded data
  9. Keywords:
  10. Microfabrication ; Brain Signals Recording ; Local Field Potential ; Microelectrode Array ; Neural Probe

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