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    Design, modeling and optimization of a novel two DOF polymeric electro-thermal micro-actuator

    , Article Applied Mechanics and Materials ; Vol. 307 , 2013 , pp. 112-116 ; ISSN: 16609336 ; ISBN: 9783037856598 Sheikhbahaie, R ; Alasty, A ; Salarieh, H ; Sharif University of Technology
    Abstract
    In this paper, design, simulation and optimization of a novel electrothermally-activated polymeric microactuator capable of generating combination of bidirectional lateral and rotational motions are presented. The composite structure of this actuator is consisted of a symmetric meandered shape silicon skeleton, a SU8 thermal expandable polymer and a thin film chrome layer heater. This actuator is controlled by applying appropriate voltages on its four terminals. With the purpose of dimension optimization, a numerical parametric study is executed. The modeled actuator which is 1560 ?m long, 156 ?m wide and 30 ?m thick, demonstrates a remarkable lateral displacement of 23 ?m at power...