Sharif Digital Repository

Over the last decades the attention of the most modern countries about usage of wind has grown due to the recent crisis of energy. This renewable energy source offers a cost effective solution for electricity production. Wind energy is the best candidate among other sources due to wind turbines technology reliability. In order to gain maximum power from wind turbines, their size becomes relatively large, which creates more complexity in their repair and maintenance, furthermore Wind turbine downtime is outside the expectations, which is more costly than corrective maintenance, therefore in order to minimize sudden downtimes and related huge maintenance, a reliable monitoring technique must... 

In the first part of the thesis, we introduce the structure of a Nano-Newton CMOS-MEMS capacitive force sensor. This force sensor has been utilized out-of-plane sensing mechanism with high accuracy and reliability. Also, we discuss about sensitivity analysis of this force sensor. The largest change of capacitance (increased capacitance + decreased capacitance) occurs in ℓ=2/3. Sensitivity for increased capacitance grows by 8.33% and for decreased capacitance grows by 2.27%. The proposed method provides useful guidelines to increase the sensitivity of the sensor up to 250%. In the second part, a fixed structure controller, PID type, is proposed to control and suppress the in-plane vibration...