Fabrication of Metallic Nano-Tip Field Emitters and Measurement

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Yazdanfar, Payam | 2010

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Type of Document: M.Sc. Thesis
Language: Farsi
Document No: 41320 (05)
University: Sharif University of Technology
Department: Electrical Engineering
Advisor(s): Rashidian, Bijan
Abstract:
The need for integration of electron guns together with thermal considerations of thermionic cathodes has led to design new cold cathode guns based on field emission phenomenon. In first part of this thesis, basic field emission theories, fabrication methods of field emitter arrays, effect of different parameters on the field emission properties of field emitter arrays and applications of these arrays are investigated. After setting up fabrication methods of nano-tip field emitters, in the second part of thesis, Si nano-tips and Si field emitter arrays are fabricated using of thermal oxidation of silicon substrate, lithography, and chemical etching of silicon oxide and silicon substrate. Si nano-tips are sharpened with thermal oxidation and etchig. Sputtering system is setupped and then Mo is claded on the Si nano tips using of sputtering process. Many Mo nano-tips and Mo-clad silicon field emitter arrays are fabricated. Improvements in methods, results and SEM images of different parts of the fabrication process are demonstrated. At the end, field emission I-V characteristics is measured
Keywords:
Filed Emission ; Lithography ; Measurement ; Electrochemical Etching ; Field Emission Array ; Thermal Oxidation ; Mask

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