Loading...

Pull-in Analysis of Nano/Micromirrors under Effect of Capillary Force with Consideration Influences of Casimir and Van Der Waals Forces

Darvishian, Ali | 2012

781 Viewed
  1. Type of Document: M.Sc. Thesis
  2. Language: English
  3. Document No: 43126 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Zohoor, Hassan
  7. Abstract:
  8. In this thesis, pull-in of nano/micromirrors under effects of capillary, Casimir and van der Waals (vdW) forces is investigated based on two models. In the first model, only rotation of torsional beams of mirror is considered. In the second model, effect of bending of the torsional beams is also considered. The static behavior of the mirror under capillary, Casimir and vdW loading are also studied using these models. Results show that neglecting bending effect, can lead to considerable overestimation in predicting the pull-in limits of the nano/micromirrors under these forces.Results reveal that the static behavior of the nano/micromirrors under these forces highly depends on the instantaneous bending of the torsional beams. It is observed that as the instability numbers, which show magnitudes of forces, increase, the rotation angle of the nano/micromirrors also increases and suddenly the pull-in occurs. Findings of this research can be used for a safe and stable design and fabrication of mirrors using the wet etching process, where the gap between the mirror and the underneath substrate is sufficiently small and as a results, Casimir and vdW forces have significant role in the stability of the system
  9. Keywords:
  10. Pull-in Phenomenon ; Casimir Force ; Van Der Waals Model ; Nanomicro Mirror ; Capillary Force

 Digital Object List

  • محتواي پايان نامه
  •   view

 Bookmark