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Sensitivity Analysis of Piezoelectrical Actuator Microgripper

Zahedi, Amin | 2011

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  1. Type of Document: M.Sc. Thesis
  2. Language: English
  3. Document No: 43223 (58)
  4. University: Sharif University of Technology, International Campus, Kish Island
  5. Department: Science and Engineering
  6. Advisor(s): Ramezani, Asghar; Ghaemi Osgouie, Kambiz
  7. Abstract:
  8. Increasing and diversified use of micro electromechanical components necessitates further development of methods for their secure gripping and transfer. In this research, a piezoelectrically driven microgripper including two gripping sets with four arms has been designed. The system can hold and handle microparts from 100 to 150 microns by applying corresponding voltages between 80 to 20 volts. The design is such that after positioning the work piece between the two microgripper arms the piezoelectric comb-drive actuators are activated. Then the two gripping arms are moved toward each other and ultimately grasp the work piece. In order to determine the behavior of the electrostatic actuators used in the proposed schema, a new formulation has been derived. The derived formula simulated the actuators’ movement with higher simplicity and accuracy compared with the other published similar models. Next, after defining the parameters regarding the proposed formulation, the displacement of arms is calculated through ANSYS finite element simulation. Following the design of the system, the experimental measurements output is compared with the results of the analytical and finite element method. The proposed analytical formulation and finite element method showed satisfactory agreement with experimental results
  9. Keywords:
  10. Sensitivity Analysis ; Piezoelectric Actuator ; Compliant Mechanism ; Electromechanical System in Micro Scale ; Microgripper

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