Loading...

Design, Fabrication and Control of a novel Polymeric Thermal Microactuator

Sheikhbahaie, Reza | 2012

618 Viewed
  1. Type of Document: M.Sc. Thesis
  2. Language: Farsi
  3. Document No: 43710 (08)
  4. University: Sharif University of Technology
  5. Department: Mechanical Engineering
  6. Advisor(s): Alasty, Aria; Salarieh, Hassan
  7. Abstract:
  8. Systems composed of electrical and mechanical elements in micrometer scale are called microelectromechanical systems which are commonly fabricated on silicon substrates. These systems are in connection with environment by the means of sensors and actuators. Thermal microactuators as one of the most applicable actuators produce force and displacement on the basis of thermal expansion.Recently, by the advent of some polymers compatible with microfabrication methods such as SU8 and due to their remarkable thermal properties,polymeric thermal microactuators are attracting more attention in a way that polymeric type of almost every predesigned thermal microactuators are fabricated and much better results are obtained.In the past six years, several papers are published about design and fabrication of polymeric microactuators with a specific composite structure.This structure is consisted of a meandered shape silicon structure, a polymeric block and a conductive thin film deposited on the silicon skleton.Furthermore,a silicon thermal microactuator was recently designed under the supervision of dr.Alasty at Sharif University of Technology and the purpose of this project is design, fabrication and open loop control of polymeric type of this actuator with predefined composite structure. To this end, first we prepare and validate a finite element model of the actuator. Then a dimensional optimization study will be completed. After that, the fabrication procedure will be performed which have two main part.The first part is the microfabrication stages of microactuator such as photolithography, thin film deposition and DRIE. The second part is the design and fabrication of the driver of the actuator. Eventually, a number of tests are needed to gather input and output data of the actuator to create and train a neural network. This network will be the main part of the open loop controller of the actuator.

  9. Keywords:
  10. Finite Element Modeling ; Construction ; Discrete Control ; Neural Networks ; Polymeric Thermal Microactuator

 Digital Object List

  • محتواي پايان نامه
  •   view

 Bookmark

No TOC