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- Type of Document: M.Sc. Thesis
- Language: Farsi
- Document No: 45733 (08)
- University: Sharif University of Technology
- Department: Mechanical Engineering
- Advisor(s): Saeedi, Mohammad Saeed; Kazemzade Hanani, Siamak
- Abstract:
- Nowadays, nanotechnology has emerged in many processes; hence the construction of this scale is also important. By reducing the size of equipment, raw material consumption is reduced and less space is needed for equipment. In addition it is economical. LIGA method has the potential to make parts with small dimensions and accurate tolerances, that it is impossible with other methods (chemical vapor deposition, physical vapor deposition, bulk micromachining, surface Machining). It is possible to assemble the pieces by producing micro-molding in LIGA procedure.In this thesis, numerical simulation of electrodeposition that is one of the main steps in the LIGA procedure has been investigated. One of the important points in this modeling is the exact calculation of contact area movement. The micro and nano scale modelings have been performed by RAYAN that can be used in LIGA procedure with lithography for making parts on nano-scale.
Effect of aspect ratio and voltage applied to the cathode on the deposition rate were firstly studiedand for every trench limiting voltage has been determinated. Then,electrodeposition with fluid flow effects, for two different geometries,has been simulated and compared with first modeling. Concentration distributions on the symmetric boundary and cathode surface have been determinated.It has been shown that a decreasein width oftrenchreduces the effect of fluid flow on electrodeposition rate - Keywords:
- Lithography ; Electrodeposition ; Lithography Galvanoformung Abformung (LIGA) ; Surface Micromachining ; Contact Area Movement
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