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A coupled two degree of freedom model for nano/micromirrors under van der waals force

Moeenfard, H ; Sharif University of Technology | 2012

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  1. Type of Document: Article
  2. DOI: 10.1115/DETC2012-70671
  3. Publisher: 2012
  4. Abstract:
  5. The current paper presents a two degree of freedom model for the problem of nano/micromirrors under the effect of vdW force. Energy method, the principal of minimum potential energy is employed for finding the equilibrium equations governing the deflection and the rotation of the nano/micromirror. Then using the implicit function theorem, a coupled bending-torsion model is presented for the pull-in characteristics of nano/micromirrors under vdW force and the concept of instability mode is introduced. It is observed that with increasing the ratio of the bending stiffness to the torsion stiffness, the dominant instability mode changes from bending mode to the torsion mode. It is shown that when the bending stiffness of the system is relatively low, the equilibrium point of a one degree of freedom torsion model considerably deviates from that of coupled model. The presented model in this paper can be used for safe and stable design of nano/micromirrors under vdW force
  6. Keywords:
  7. Instability ; Equilibrium equation ; Implicit function theorem ; Minimum potential energy ; Nano/micromirror ; Pull-in ; Torsion stiffness ; Two-degree-of-freedom models ; Vdw force ; Design ; Nanosystems ; Plasma stability ; Stiffness ; Torsional stress ; Van der Waals forces
  8. Source: Proceedings of the ASME Design Engineering Technical Conference ; Volume 5 , 2012 , Pages 145-150 ; 9780791845042 (ISBN)
  9. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1736569