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Analytical solutions for the static instability of nano-switches under the effect of casimir force and electrostatic actuation

Mojahedi, M ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.1115/IMECE2009-12379
  3. Abstract:
  4. This paper deals with the problem of static instability of nano switches under the effect of Casimir force and electrostatic actuation. The nonlinear fringing field effect has been accounted for in the model. Using a Galerkin decomposition method and considering only one mode, the nonlinear boundary value problem describing the static behavior of nano-switch, is reduced to a nonlinear boundary value ordinary differential equation which is solved using the homotopy perturbation method (HPM). In order to ensure the precision of the results, the number of included terms in the perturbation expansion has been investigated. Results have been compared with numerical results and also with previously published analytical results. It was observed that HPM modifies the overestimation of N/MEMS instability limits reported in the literature and can be used as an effective and accurate design tool in the analysis of N/MEMS
  5. Keywords:
  6. Damping ; Electric furnaces ; Electrostatic actuators ; Electrostatics ; Mechanical engineering ; Nonlinear equations ; Numerical analysis ; Ordinary differential equations ; Quantum theory ; Stability ; Accurate design ; Analytical results ; Analytical solutions ; Casimir force ; Electrostatic actuation ; Fringing field effects ; Galerkin decomposition ; Homotopy perturbation method ; Nano-switches ; Nonlinear boundary ; Nonlinear boundary value problems ; Numerical results ; Perturbation expansions ; Pull-in instability ; Static behaviors ; Static instability ; Perturbation techniques
  7. Source: ASME International Mechanical Engineering Congress and Exposition, Proceedings, 13 November 2009 through 19 November 2009 ; Volume 12, Issue PART A , 2010 , Pages 63-69 ; 9780791843857 (ISBN)
  8. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1642503